JPH089168Y2 - 赤外線集中加熱単結晶製造装置 - Google Patents

赤外線集中加熱単結晶製造装置

Info

Publication number
JPH089168Y2
JPH089168Y2 JP11157189U JP11157189U JPH089168Y2 JP H089168 Y2 JPH089168 Y2 JP H089168Y2 JP 11157189 U JP11157189 U JP 11157189U JP 11157189 U JP11157189 U JP 11157189U JP H089168 Y2 JPH089168 Y2 JP H089168Y2
Authority
JP
Japan
Prior art keywords
infrared
single crystal
main shaft
rod
spindle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11157189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350054U (en]
Inventor
誠一 高須
博 西村
Original Assignee
ニチデン機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ニチデン機械株式会社 filed Critical ニチデン機械株式会社
Priority to JP11157189U priority Critical patent/JPH089168Y2/ja
Publication of JPH0350054U publication Critical patent/JPH0350054U/ja
Application granted granted Critical
Publication of JPH089168Y2 publication Critical patent/JPH089168Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP11157189U 1989-09-22 1989-09-22 赤外線集中加熱単結晶製造装置 Expired - Lifetime JPH089168Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11157189U JPH089168Y2 (ja) 1989-09-22 1989-09-22 赤外線集中加熱単結晶製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11157189U JPH089168Y2 (ja) 1989-09-22 1989-09-22 赤外線集中加熱単結晶製造装置

Publications (2)

Publication Number Publication Date
JPH0350054U JPH0350054U (en]) 1991-05-15
JPH089168Y2 true JPH089168Y2 (ja) 1996-03-13

Family

ID=31660041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11157189U Expired - Lifetime JPH089168Y2 (ja) 1989-09-22 1989-09-22 赤外線集中加熱単結晶製造装置

Country Status (1)

Country Link
JP (1) JPH089168Y2 (en])

Also Published As

Publication number Publication date
JPH0350054U (en]) 1991-05-15

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